Ogden Engineering & Associates

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 226 citations · Full text

Materials Science, Engineering, Microfabrication +5

Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

Chih‐Ming Lin, Ting-Ta Yen, Valery V. Felmetsger et al. · Applied Physics Letters · 2010 · 128 citations

Aluminium Nitride, Electrical Engineering, Aluminum Nitride +9

AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices

Chih‐Ming Lin, Wei-Cheng Lien, Valery V. Felmetsger et al. · Applied Physics Letters · 2010 · 78 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Deposition of ultrathin AlN films for high frequency electroacoustic devices

Valery V. Felmetsger, Pavel N. Laptev, R. J. Graham · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 56 citations

Aluminium Nitride, Engineering, Acoustic Metamaterial +16

Characteristics of AlN Lamb wave resonators with various bottom electrode configurations

Chih‐Ming Lin, Ventsislav Yantchev, Yung-Yu Chen et al. · 2011 · 33 citations

Aluminium Nitride, Electrical Engineering, Aluminum Nitride +7