Paul Muralt

Thin Film Piezoelectrics for MEMS

Susan Trolier‐McKinstry, Paul Muralt · Journal of Electroceramics · 2004 · 991 citations · Full text

Materials Science, Electrical Engineering, Engineering +7

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 430 citations · Full text

Materials Science, Aluminium Nitride, Electrical Engineering +14

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 391 citations · Full text

Materials Science, Electrical Engineering, Engineering +10

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2000 · 373 citations · Full text

Engineering, Mechanical Engineering, Piezoelectric Properties +19

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry · MRS Bulletin · 2009 · 359 citations · Full text

Materials Science, Energy Harvesting, Engineering +5