Paul Muralt

Thin Film Piezoelectrics for MEMS

Susan Trolier‐McKinstry, Paul Muralt · Journal of Electroceramics · 2004 · 1K citations · Full text

Engineering, Materials Engineering, Materials Science +12

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2000 · 374 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Paul Muralt, Ronald G. Polcawich, Susan Trolier‐McKinstry · MRS Bulletin · 2009 · 363 citations · Full text

Engineering, Materials Engineering, Materials Science +14