M.-A. Dubois

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Publications

Citations

1.9K

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Active since

1998

Affiliations

Swiss Center for Electronics and Microtechnology (Switzerland)(Current)

École Polytechnique Fédérale de Lausanne

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

M.-A. Dubois is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in materials science, thin films, and materials engineering.

ORCID

Publications per year

1998–2017

Publications

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Thickness dependence of the properties of highly<i>c</i>-axis textured AlN thin films

F. Martin, Paul Muralt, M.-A. Dubois et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 304 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

M.-A. Dubois, Paul Muralt · Sensors and Actuators A Physical · 1999 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Integration of high-Q BAW resonators and filters above IC

M.-A. Dubois, C. Billard, Claude Muller et al. · 2005 · 56 citations

Engineering, Electrical Engineering, Analog Electronics +16

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