Concepedia

M.-A. Dubois

MD

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Publications

27

Citations

1.9K

H-Index

17

Active since

1998

Affiliations

Swiss Center for Electronics and Microtechnology (Switzerland)(Current)

École Polytechnique Fédérale de Lausanne

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

M.-A. Dubois is an author at Swiss Center for Electronics and Microtechnology (Switzerland) specializing in engineering, applied physics, and materials science.

ORCID

Top concepts

Publications per year

1998–2017

27

Publications

27

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 430 citations · Full text

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Thickness dependence of the properties of highly<i>c</i>-axis textured AlN thin films

F. Martin, Paul Muralt, M.-A. Dubois et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 301 citations · Full text

, , +16

Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films

M.-A. Dubois, Paul Muralt · Sensors and Actuators A Physical · 1999 · 297 citations · Full text

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Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 297 citations · Full text

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Integration of high-Q BAW resonators and filters above IC

M.-A. Dubois, C. Billard, Claude Muller et al. · 2005 · 56 citations

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