Nicolas Ledermann

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Paul Muralt, Nicolas Ledermann, J. Paborowski et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2005 · 331 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Sputtered silicon carbide thin films as protective coating for MEMS applications

Nicolas Ledermann, J. Baborowski, Paul Muralt et al. · Surface and Coatings Technology · 2000 · 90 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Piezoelectric Pb(Zr<i>_x</i>, Ti₁<i>_x</i>)O₃thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Journal of Micromechanics and Microengineering · 2004 · 88 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

A. Barzegar, Dragan Damjanović, Nicolas Ledermann et al. · Journal of Applied Physics · 2003 · 70 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14