{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties - Concepedia

Concepedia

Publication | Open Access

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

DOI Full Paper Access

391

Citations

37

References

2003

Year

Nicolas Ledermann, Paul Muralt, J. Baborowski, Sandrine Gentil, Kapil Mukati, Marco Cantoni, Andreas Seifert, N. Setter

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringEngineeringPiezoelectric PbOxide ElectronicsSurface ScienceApplied PhysicsPiezoelectricityPiezoelectric MaterialThin Film Process TechnologyThin FilmsO3 Thin FilmsThin Film Processing

References

	Year	Citations

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