J. Baborowski

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Sensors and Actuators A Physical · 2003 · 394 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Simon Bühlmann, B. Dwir, J. Baborowski et al. · Applied Physics Letters · 2002 · 248 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

Paul Muralt, J. Baborowski · Journal of Electroceramics · 2004 · 108 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Sputtered silicon carbide thin films as protective coating for MEMS applications

Nicolas Ledermann, J. Baborowski, Paul Muralt et al. · Surface and Coatings Technology · 2000 · 90 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Piezoelectric Pb(Zr<i>_x</i>, Ti₁<i>_x</i>)O₃thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Nicolas Ledermann, Paul Muralt, J. Baborowski et al. · Journal of Micromechanics and Microengineering · 2004 · 88 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17