Concepedia

Valeriy Felmetsger

VF

Statistics

Publications

16

Citations

516

H-Index

12

Active since

2004

Affiliations

Ogden Engineering & Associates(Current)

Universidad Politécnica de Madrid

University of Florida

University of Pennsylvania

Valeriy Felmetsger is an author at Ogden Engineering & Associates specializing in materials science, natural sciences, and materials engineering.

ORCID

Publications per year

2004–2020

16

Publications

16

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 237 citations · Full text

, , +16

Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 34 citations

, , +16

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

E. Iborra, M. Clément, J. Capilla et al. · Thin Solid Films · 2011 · 29 citations

, , +13

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

S. M. Tanner, Valeriy Felmetsger · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 29 citations

, , +17

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Surface and Coatings Technology · 2009 · 27 citations

, , +7

1–5 of 16