Valeriy Felmetsger

Piezoelectric aluminum nitride thin films for microelectromechanical systems

Gianluca Piazza, Valeriy Felmetsger, Paul Muralt et al. · MRS Bulletin · 2012 · 226 citations · Full text

Materials Science, Engineering, Microfabrication +5

Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 34 citations

Materials Science, Aluminium Nitride, Electrical Engineering +13

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

E. Iborra, M. Clément, J. Capilla et al. · Thin Solid Films · 2011 · 29 citations · Full text

Materials Science, Low-thickness High-quality Aluminum, Electrical Engineering +7

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

S. M. Tanner, Valeriy Felmetsger · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 29 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +16

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Surface and Coatings Technology · 2009 · 27 citations

Electrical Engineering, Engineering, Operation Mode +2