S. M. Tanner

Piezoelectric aluminum nitride nanoelectromechanical actuators

Nipun Sinha, Graham E. Wabiszewski, Rashed Mahameed et al. · Applied Physics Letters · 2009 · 164 citations

Engineering, Mechanical Engineering, Micro-electromechanical System +17

High-Q GaN nanowire resonators and oscillators

S. M. Tanner, Jason M. Gray, Charles T. Rogers et al. · Applied Physics Letters · 2007 · 133 citations

Materials Science, Electrical Engineering, Piezoelectric Gan +10

Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 34 citations

Materials Science, Aluminium Nitride, Electrical Engineering +13

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

S. M. Tanner, Valeriy Felmetsger · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 29 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +16

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Surface and Coatings Technology · 2009 · 27 citations

Electrical Engineering, Engineering, Operation Mode +2