Concepedia

Pavel N. Laptev

PN

5

Publications

142

Citations

5

H-Index

2004

Active since

Affiliations

Ogden Engineering & Associates(Current)

Pavel N. Laptev is an author at Ogden Engineering & Associates specializing in engineering, electrical engineering, and thin films.

Top concepts

EngineeringThin FilmsApplied PhysicsMaterial ScienceElectrical EngineeringNanotechnologySurface ScienceMicrostructureElectrochemistryCrystalline Defects

Publications per year

2004–2011

5

Publications

5

Deposition of ultrathin AlN films for high frequency electroacoustic devices

Valery V. Felmetsger, Pavel N. Laptev, R. J. Graham · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 56 citations

Aluminium Nitride, Engineering, Acoustic Metamaterial +16

Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 34 citations

Materials Science, Aluminium Nitride, Electrical Engineering +13

Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering

Valeriy Felmetsger, Pavel N. Laptev, S. M. Tanner · Surface and Coatings Technology · 2009 · 27 citations

Electrical Engineering, Engineering, Operation Mode +2

Crystal orientation and stress in AC reactively sputtered AlN films on Mo electrodes for electro-acoustic devices

Valery V. Felmetsger, Pavel N. Laptev, S. M. Tanner · 2008 · 15 citations

Materials Science, Materials Engineering, Aln Films +14

Dual cathode DC–RF and MF–RF coupled S-Guns for reactive sputtering

Valeriy Felmetsger, Pavel N. Laptev · Vacuum · 2004 · 10 citations

Engineering, Computational Electromagnetics, Reactive Sputtering +1

Rows per page

1–5 of 5