Concepedia

Markku Ylilammi

MY

18

Publications

1.3K

Citations

13

H-Index

1992

Active since

Affiliations

VTT Technical Research Centre of Finland(Current)

Aalto University

Nokia (Finland)

Helsinki Institute of Physics

Markku Ylilammi is an author at VTT Technical Research Centre of Finland specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsThin FilmsSurface ScienceMaterials EngineeringElectrical EngineeringMicroelectronicsInstrumentation

Publications per year

1992–2020

18

Publications

18

Piezoelectric coefficients and spontaneous polarization of ScAlN

A. Miguel, Siyuan Zhang, Tommi Riekkinen et al. · Journal of Physics Condensed Matter · 2015 · 337 citations

Engineering, Mechanical Engineering, Piezoelectric Coefficients +16

Optical determination of the film thicknesses in multilayer thin film structures

Markku Ylilammi, Timo Ranta-aho · Thin Solid Films · 1993 · 225 citations

Materials Science, Surface Characterization, Thin Film Physics +10

Monolayer thickness in atomic layer deposition

Markku Ylilammi · Thin Solid Films · 1996 · 137 citations

Materials Science, Engineering, Surface Science +6

Spurious resonance free bulk acoustic wave resonators

J. Kaitila, Markku Ylilammi, J. Ellä et al. · 2004 · 133 citations

Smr Configuration, Engineering, Physics +8

Metal Fluoride Thin Films Prepared by Atomic Layer Deposition

Markku Ylilammi, Timo Ranta-aho · Journal of The Electrochemical Society · 1994 · 68 citations

Materials Science, Thin Film Physics, Optical Materials +11

Rows per page

1–5 of 18