J. M. Molarius

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

Materials Science, Materials Engineering, Engineering +6

Ti–N phases formed by reactive ion plating

J. M. Molarius, Ari Korhonen, E.O. Ristolainen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 99 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Comparison of cutting performance of ion-plated NbN, ZrN, TiN and (Ti, Al)N coatings

J. M. Molarius, Ari Korhonen, E. Harju et al. · Surface and Coatings Technology · 1987 · 95 citations

Materials Science, Materials Engineering, Engineering +8

Amorphous Ta–Si–N thin-film alloys as diffusion barrier in Al/Si metallizations

E. Kolawa, J. M. Molarius, C. W. Nieh et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 76 citations

Materials Science, Materials Engineering, Rf Reactive Sputtering +13

Piezoelectric ZnO films by r.f. sputtering

J. M. Molarius · Journal of Materials Science Materials in Electronics · 2003 · 58 citations