Minimization of specific contact resistance in multiple gate NFETs by selective epitaxial growth of Si in the HDD regions

Abhisek Dixit, K.G. Anil, R. Rooyackers, Frederik Leys, M. Kaiser, Nadine Collaert, K. De Meyer, M. Jurczak, S. Biesemans

Solid-State Electronics · 2006 · 16 citations · 6 references

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