Concepedia

Publication | Closed Access

A robust spacer gate process for deca-nanometer high-frequency MOSFETs

DOI

34

Citations

8

References

2005

Year

Julius Hållstedt, Per‐Erik Hellström, Z. Zhang, B. Gunnar Malm, J. Edholm, Jun Lu, S.-L. Zhang, Henry H. Radamson, Mikael Östling
Microelectronic Engineering

References

YearCitations

Page 1