Hideo Namatsu

Three-dimensional siloxane resist for the formation of nanopatterns with minimum linewidth fluctuations

Hideo Namatsu, Yasuo Takahashi, Kenji Yamazaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 286 citations

Engineering, Materials Engineering, Materials Science +11

Single electron tunneling transistor with tunable barriers using silicon nanowire metal-oxide-semiconductor field-effect transistor

Akira Fujiwara, Hiroshi Inokawa, Kenji Yamazaki et al. · Applied Physics Letters · 2006 · 127 citations

Engineering, Electrical Engineering, Materials Science +17

Dimensional limitations of silicon nanolines resulting from pattern distortion due to surface tension of rinse water

Hideo Namatsu, Kenji Kurihara, Masao Nagase et al. · Applied Physics Letters · 1995 · 124 citations

Engineering, Materials Engineering, Materials Science +17

Influence of edge roughness in resist patterns on etched patterns

Hideo Namatsu, Masao Nagase, Toru Yamaguchi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 111 citations

Natural Sciences, Materials Engineering, Materials Science +16

Nanometer-scale linewidth fluctuations caused by polymer aggregates in resist films

Toru Yamaguchi, Hideo Namatsu, Masao Nagase et al. · Applied Physics Letters · 1997 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +17