Statistics
Publications
2
Citations
175
H-Index
2
Active since
1999
Affiliations
University of Wisconsin–Madison(Current)
Di He is an author at University of Wisconsin–Madison specializing in optics, optical lithography, and materials science.
Publications per year
1999–1999
2
2
Nanolithography using extreme ultraviolet lithography interferometry: 19 nm lines and spaces
H. H. Solak, Di He, W. Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 55 citations
Natural Sciences, Materials Engineering, Materials Science +15
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