3
Publications
188
Citations
3
H-Index
1999
Active since
Affiliations
University of Wisconsin–Madison(Current)
W. Li is an author at University of Wisconsin–Madison specializing in engineering, applied physics, and photonics.
Top concepts
EngineeringApplied PhysicsPhotonicsMicroscopyOptoelectronicsMicrofabricationOptical MaterialsOptical PropertiesPhysicsNanophotonics
Publications per year
1999–2000
3
3
Nanolithography using extreme ultraviolet lithography interferometry: 19 nm lines and spaces
H. H. Solak, Di He, W. Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 55 citations
Optical Materials, Engineering, Electron-beam Lithography +19
Rows per page
1–3 of 3