18
Publications
846
Citations
12
H-Index
51
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 9 | 9 | 789 |
2 | Applied Physics | 8 | 8 | 746 |
3 | Medicine | 3 | 3 | 49 |
4 | Natural Sciences | 2 | 2 | 127 |
5 | Nursing | 1 | 1 | 13 |
Uday Shah
×
12
Publications
838
Citations
12
H-Index
| Year | Citations | |
|---|---|---|
2006 | 220 | |
2011 | 136 | |
2009 | 136 | |
2010 | 93 | |
2010 | 89 | |
2006 | 43 | |
2008 | 38 | |
2004 | 24 | |
EUV lithography for 22nm half pitch and beyond: exploring resolution, LWR, and sensitivity tradeoffs E. Steve Putna, Todd R. Younkin, Michael Leeson, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyEuv LithographyTarget Fabrication | 2011 | 18 |
2006 | 16 |
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