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TMAH-based wet surface pre-treatment for reduction of leakage current in AlGaN/GaN MIS-HEMTs

Wide-bandgap SemiconductorElectrical EngineeringEngineeringAlgan/gan Mis-hemtsApplied PhysicsAluminum Gallium NitrideGan Power DeviceCategoryiii-v SemiconductorOptoelectronics