On-Resistance Modulation of High Voltage GaN HEMT on Sapphire Substrate Under High Applied Voltage

Wataru Saito, T. Nitta, Yorito Kakiuchi, Y. Saito, K. Tsuda, Ichiro Omura, Masakazu Yamaguchi

IEEE Electron Device Letters · 2007 · 52 citations · 11 references

Concepts

Abstract

The 620-V/1.4-A GaN high-electron mobility transistors on sapphire substrate were fabricated and the ON-resistance modulations caused by current collapse phenomena were measured under high applied voltage. Since the fabricated devices had insulating substrates, no field-plate (FP) effect was expected and the ON-resistance increases of these devices were larger than those on an n-SiC substrate even with the same source-FP structure. The dual-FP structure, which was a combination of gate FP and source FP, was effective in suppressing the ON -resistance increase due to minimization of the gate-edge electric field concentration. The ON-resistance after the applied voltage of 250 V decreased by twice that at low drain voltage by the dual-FP structure. Gallium nitride (GaN), high-electron mobility transistor (HEMT), high voltage, power semiconductor device.

References

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