Demonstration, Analysis, and Device Design Considerations for Independent DG MOSFETs

Abstract

This paper describes a comprehensive study on the threshold voltage (V/sub th/) controllability of four-terminal-driven double-gate (DG) MOSFETs (4T-XMOSFETs) with independently switched DGs. Two types of 4T-XMOSFETs (fin and vertical) are experimentally demonstrated and their V/sub th/ controllability is thoroughly investigated in relation to the initial V/sub th/ in the DG-mode based on comprehensible modeling of the devices. Based on the investigation and simulated predictions, device design guidelines for 4T-XMOSFETs are proposed. Decreasing the workfunction of the DGs and increasing the oxide thickness of the second gate (T/sub ox2/) are preferable for improving the performance of the 4T-XMOSFET. The optimum workfunction of DGs for attaining low I/sub off(stand-by)/ and high I/sub on(active)/ under the limited V/sub g2/ condition is also proposed.