Nano-scale fluctuations in electron beam resist pattern evaluated by atomic force microscopy

Fabrication technique for Si single-electron transistoroperating at room temperature

Yasuo Takahashi, Masao Nagase, H. Namatsu et al. · Electronics Letters · 1995 · 335 citations

Engineering, Electrical Engineering, Materials Science +17

Nano edge roughness in polymer resist patterns

Toshiyuki Yoshimura, Hiroshi Shiraishi, Jiro Yamamoto et al. · Applied Physics Letters · 1993 · 89 citations

Engineering, Materials Engineering, Materials Science +12

Fabrication of a silicon quantum wire surrounded by silicon dioxide and its transport properties

Yasuyuki Nakajima, Yoshiro Takahashi, S. Horiguchi et al. · Applied Physics Letters · 1994 · 71 citations

Engineering, Materials Engineering, Materials Science +17

Metrology of Atomic Force Microscopy for Si Nano-Structures

Masao Nagase, Hideo Namatsu, Kenji Kurihara et al. · Japanese Journal of Applied Physics · 1995 · 53 citations

Natural Sciences, Materials Science, Physics +14

10-nm silicon lines fabricated in (110) silicon

H. Namatsu, Masao Nagase, K. Kurihara et al. · Microelectronic Engineering · 1995 · 29 citations

Engineering, Materials Engineering, Materials Science +11