Concepedia

K. Kurihara

KK

Statistics

Publications

29

Citations

1.8K

H-Index

20

Active since

1989

Affiliations

NTT Basic Research Laboratories(Current)

Okayama University

Okayama University of Science

NTT (Japan)

University of Cambridge

K. Kurihara is an author at NTT Basic Research Laboratories specializing in engineering, materials science, and semiconductor devices.

ORCID

Publications per year

1989–2019

29

Publications

29

Fabrication technique for Si single-electron transistoroperating at room temperature

Yasuo Takahashi, Masao Nagase, H. Namatsu et al. · Electronics Letters · 1995 · 335 citations

, , +17

Soft x-ray reduction lithography using multilayer mirrors

Hiroo Kinoshita, K. Kurihara, Yui Ishii et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 269 citations

, , +17

Size dependence of the characteristics of Si single-electron transistors on SIMOX substrates

Yasuo Takahashi, H. Namatsu, K. Kurihara et al. · IEEE Transactions on Electron Devices · 1996 · 195 citations

, , +17

Nano-patterning of a hydrogen silsesquioxane resist with reduced linewidth fluctuations

H. Namatsu, Toru Yamaguchi, Masao Nagase et al. · Microelectronic Engineering · 1998 · 156 citations

, , +8

Fabrication method for IC-oriented Si single-electron transistors

Y. Ono, Yasuo Takahashi, Kenji Yamazaki et al. · IEEE Transactions on Electron Devices · 2000 · 97 citations

, , +17

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