Publication | Closed Access
Nano-patterning of a hydrogen silsesquioxane resist with reduced linewidth fluctuations
156
Citations
5
References
1998
Year
EngineeringElectronic MaterialsPhysicsNanomaterialsNanotechnologyNanoelectronicsSurface ScienceApplied PhysicsNatural SciencesSiliceneNanoscale ModelingNanometrologyChemistryHydrogen Silsesquioxane ResistNanoscale ScienceNanolithography Method
| Year | Citations | |
|---|---|---|
Page 1
Page 1