Hiroo Kinoshita

Soft x-ray reduction lithography using multilayer mirrors

Hiroo Kinoshita, K. Kurihara, Yui Ishii et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 269 citations

Optical Materials, Engineering, Microscopy +22

Optical properties and Faraday effect of ceramic terbium gallium garnet for a room temperature Faraday rotator

Hidetsugu Yoshida, Koji Tsubakimoto, Yasushi Fujimoto et al. · Optics Express · 2011 · 126 citations · Full text

Photonics, Electrical Engineering, Optical Materials +13

Mask observation results using a coherent extreme ultraviolet scattering microscope at NewSUBARU

Tetsuo Harada, Junki Kishimoto, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 50 citations

Numerical Aperture, Coherent Extreme Ultraviolet, Engineering +15

Printability of native blank defects and programmed defects and their stack structures

Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 47 citations

Engineering, Electron-beam Lithography, Microscopy +17

Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU

Takeo Watanabe, Hiroo Kinoshita, Noriyuki Sakaya et al. · Japanese Journal of Applied Physics · 2005 · 42 citations

Engineering, Electron-beam Lithography, Ion Beam Instrumentation +19