Concepedia

Ranganath Teki

RT

Statistics

Publications

2

Citations

60

H-Index

2

Active since

2011

Affiliations

RWTH Aachen University(Current)

Ranganath Teki is an author at RWTH Aachen University specializing in surface science, applied physics, and microfabrication.

Top concepts

Publications per year

2011–2012

2

Publications

2

Printability of native blank defects and programmed defects and their stack structures

Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 47 citations

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Alternative smoothing techniques to mitigate EUV substrate defectivity

Ranganath Teki, Arun John Kadaksham, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

, , +21

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