Concepedia

Author

Jenah Harris-Jones

Lawrence Berkeley National Laboratory

Also Known As

J. Harris-Jones, Jenah Harris-Jones

22

Publications

165

Citations

7

H-Index

17

Concepts

All Affiliations

Lawrence Berkeley National Laboratory
JH

About

Jenah Harris-Jones is an author at Lawrence Berkeley National Laboratory specializing in surface science, applied physics, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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91

2

Applied Physics

4

4

91

3

Materials Engineering

3

3

44

4

Computer Engineering

2

2

62

5

Chemical Engineering

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1

13

Jenah Harris-Jones

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5

Publications

101

Citations

5

H-Index

YearCitations

Printability of native blank defects and programmed defects and their stack structures

Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2011

47

Modeling the EUV multilayer deposition process on EUV blanks

V. K. Jindal, Patrick A. Kearney, Jenah Harris-Jones,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2011

16

EUV mask multilayer defects and their printability under different multilayer deposition conditions

Hyuk Joo Kwon, Jenah Harris-Jones, Aaron Cordes,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012

15

Alternative smoothing techniques to mitigate EUV substrate defectivity

Ranganath Teki, Arun John Kadaksham, Matt House,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2012

13

Inspection and compositional analysis of sub-20 nm EUV mask blank defects by thin film decoration technique

V. K. Jindal, Arun John, Jenah Harris-Jones,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

10

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