Jenah Harris-Jones

Printability of native blank defects and programmed defects and their stack structures

Hyuk Joo Kwon, Jenah Harris-Jones, Ranganath Teki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 47 citations

Engineering, Electron-beam Lithography, Microscopy +17

Modeling the EUV multilayer deposition process on EUV blanks

V. K. Jindal, Patrick A. Kearney, Jenah Harris-Jones et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations

Engineering, Electron-beam Lithography, Euv Blanks +16

EUV mask multilayer defects and their printability under different multilayer deposition conditions

Hyuk Joo Kwon, Jenah Harris-Jones, Aaron Cordes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 15 citations

Engineering, Defect Tolerance, Extreme Ultraviolet +18

Alternative smoothing techniques to mitigate EUV substrate defectivity

Ranganath Teki, Arun John Kadaksham, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Silicon On Insulator, Defect Tolerance +21

Inspection and compositional analysis of sub-20 nm EUV mask blank defects by thin film decoration technique

V. K. Jindal, Arun John, Jenah Harris-Jones et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations