Patrick A. Kearney

Statistics

Publications

Citations

758

H-Index

Active since

1991

Affiliations

Lawrence Livermore National Laboratory(Current)

Lawrence Berkeley National Laboratory

University of Arizona

Sandia National Laboratories California

GlobalFoundries (United States)

Patrick A. Kearney is an author at Lawrence Livermore National Laboratory specializing in materials engineering, materials science, and natural sciences.

Publications per year

1991–2016

Publications

Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

S. Bajt, D. G. Stearns, Patrick A. Kearney · Journal of Applied Physics · 2001 · 147 citations

Natural Sciences, Materials Engineering, Materials Science +17

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter et al. · Applied Optics · 1996 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of molybdenum on silicon: Structure and interface formation

J. M. Slaughter, Arye Shapiro, Patrick A. Kearney et al. · Physical review. B, Condensed matter · 1991 · 62 citations

Engineering, Materials Engineering, Materials Science +17

Mask blanks for extreme ultraviolet lithography: Ion beam sputter deposition of low defect density Mo/Si multilayers

Patrick A. Kearney, C.E. Moore, Shuyong Tan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 42 citations

Engineering, Materials Engineering, Materials Science +17

The influence of biological fluids on crack spacing distribution in Si-DLC films on steel substrates

A. A. Ogwu, Thomas W. Coyle, T.I.T. Okpalugo et al. · Acta Materialia · 2003 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14

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