Patrick A. Kearney

Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

S. Bajt, D. G. Stearns, Patrick A. Kearney · Journal of Applied Physics · 2001 · 147 citations

Natural Sciences, Materials Engineering, Materials Science +17

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter et al. · Applied Optics · 1996 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of molybdenum on silicon: Structure and interface formation

J. M. Slaughter, Arye Shapiro, Patrick A. Kearney et al. · Physical review. B, Condensed matter · 1991 · 62 citations

Engineering, Materials Engineering, Materials Science +17

Mask blanks for extreme ultraviolet lithography: Ion beam sputter deposition of low defect density Mo/Si multilayers

Patrick A. Kearney, C.E. Moore, Shuyong Tan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 42 citations

Engineering, Materials Engineering, Materials Science +17

The influence of biological fluids on crack spacing distribution in Si-DLC films on steel substrates

A. A. Ogwu, Thomas W. Coyle, T.I.T. Okpalugo et al. · Acta Materialia · 2003 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14