Claude Montcalm

Multilayer reflective coatings for extreme-ultraviolet lithography

Claude Montcalm, S. Bajt, Paul B. Mirkarimi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 102 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter et al. · Applied Optics · 1996 · 82 citations

Advances in multilayer reflective coatings for extreme ultraviolet lithography

James A. Folta, S. Bajt, Troy W. Barbee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 47 citations

Optical Materials, Engineering, Optical Coatings +17

<title>System integration and performance of the EUV engineering test stand</title>

Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations

Engineering Test Stand, Engineering, Electron-beam Lithography +28

Molybdenum–strontium multilayer mirrors for the 8–12-nm extreme-ultraviolet wavelength region

Benjawan Sae-Lao, Claude Montcalm · Optics Letters · 2001 · 36 citations

Short Wavelength Optic, Optical Materials, Engineering +16