Concepedia
Statistics
Publications
6
Citations
153
H-Index
Active since
2000
Affiliations
Lawrence Berkeley National Laboratory(Current)
Lawrence Livermore National Laboratory
Intel (United States)
Sandia National Laboratories California
ASML (Netherlands)
William C. Replogle is an author at Lawrence Berkeley National Laboratory specializing in optoelectronics, optics, and physics.
Publications per year
2000–2002
<title>System integration and performance of the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations
Natural Sciences, Physics, Digital Imaging +7
First lithographic results from the extreme ultraviolet Engineering Test Stand
Henry N. Chapman, Avijit K. Ray-Chaudhuri, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations
Engineering, Electrical Engineering, Optics +10
<title>EUV engineering test stand</title>
Daniel A. Tichenor, Glenn D. Kubiak, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 34 citations · Full text
Engineering, Physics, Instrumentation +8
<title>Initial results from the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations
Natural Sciences, Physics, Digital Imaging +8
Performance upgrades in the EUV engineering test stand
Daniel A. Tichenor, William C. Replogle, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations
Engineering, Manufacturing Engineering, Digital Imaging +14
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