Concepedia

Matt House

MH

3

Publications

38

Citations

3

H-Index

2010

Active since

Affiliations

Clarkson University(Current)

Matt House is an author at Clarkson University specializing in surface science, microfabrication, and engineering.

Top concepts

EngineeringSurface ScienceMicroelectronicsMicrofabricationApplied PhysicsMaterial ScienceChemical EngineeringPhysicsHydrogenChemistry

Publications per year

2010–2012

3

Publications

3

Alternative smoothing techniques to mitigate EUV substrate defectivity

Ranganath Teki, Arun John Kadaksham, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Silicon On Insulator, Defect Tolerance +21

Current status of EUV mask blanks and LTEM substrates defectivity and cleaning of blanks exposed in EUV ADT

Arun John Kadaksham, Byunghoon Lee, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 13 citations

Engineering, Electron-beam Lithography, Microscopy +17

Particle removal challenges of EUV patterned masks for the sub-22nm HP node

Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Engineering, Electron-beam Lithography, Target Fabrication +16

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