5
Publications
247
Citations
5
H-Index
2002
Active since
Affiliations
Sean Eichenlaub is an author at Arizona State University specializing in engineering, microelectronics, and mechanical engineering.
Top concepts
EngineeringRheologyMechanicsSurface ScienceMaterial ScienceMicroelectronicsChemical EngineeringMechanical EngineeringHydrogenChemistry
Publications per year
2002–2010
5
5
Adhesion of Alumina Particles to Thin Films
Kevin Cooper, Sean Eichenlaub, Anand Gupta et al. · Journal of The Electrochemical Society · 2002 · 19 citations
Particle removal challenges of EUV patterned masks for the sub-22nm HP node
Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations
Engineering, Electron-beam Lithography, Target Fabrication +16
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