Arun John Kadaksham

Trapping heavy metals by using calcium hydroxyapatite and dielectrophoresis

John Batton, Arun John Kadaksham, Ange Nzihou et al. · Journal of Hazardous Materials · 2006 · 29 citations · Full text

Materials Science, Engineering, Nanomaterials +5

Alternative smoothing techniques to mitigate EUV substrate defectivity

Ranganath Teki, Arun John Kadaksham, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Silicon On Insulator, Defect Tolerance +21

Current status of EUV mask blanks and LTEM substrates defectivity and cleaning of blanks exposed in EUV ADT

Arun John Kadaksham, Byunghoon Lee, Matt House et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 13 citations

Engineering, Electron-beam Lithography, Microscopy +17

Particle removal challenges of EUV patterned masks for the sub-22nm HP node

Abbas Rastegar, Sean Eichenlaub, Arun John Kadaksham et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Engineering, Electron-beam Lithography, Target Fabrication +16

Cleaning Challenges of EUV Mask Substrates, Blanks, and Patterned Mask

Abbas Rastegar, Matthew House, Arun John Kadaksham · ECS Transactions · 2011 · 11 citations