Concepedia
Statistics
Publications
232
Citations
3.7K
Authors
31
Location
Chandler, United States
ASML (United States) is a company institution in Chandler, United States known for engineering, optics, and natural sciences.
Top concepts
EngineeringManufacturing EngineeringMask FabricationOpticsElectrical EngineeringSemiconductor DevicesElectronic MaterialsIntegrated Circuit DesignMask DesignElectron Beam Lithography
ASML (United States), United States
35 publications · 302 citations
10
h-index
24 publications · 127 citations
7
42 publications · 130 citations
6
6 publications · 123 citations
5
15 publications · 53 citations
1–5 of 31
Progress on EUV pellicle development
Carmen Zoldesi, K. Bal, Brian Blum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 85 citations
Natural Sciences, Manufacturing Engineering, Materials Science +10
Simultaneous source mask optimization (SMO)
Robert Socha, Xuelong Shi, David LeHoty · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 75 citations
Architecture, Design, Design Optimization +13
Novel diffraction-based spectroscopic method for overlay metrology
Weidong Yang, R. Lowe-Webb, Silvio Rabello et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 47 citations
Engineering, Manufacturing Engineering, Materials Science +16
The use of EUV lithography to produce demonstration devices
Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
Benefits and limitations of immersion lithography
Journal of Micro/Nanolithography MEMS and MOEMS · 2004 · 39 citations
Engineering, Bioengineering, Optical Materials +10
1–5 of 232