Weidong Yang

Novel diffraction-based spectroscopic method for overlay metrology

Weidong Yang, R. Lowe-Webb, Silvio Rabello et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 47 citations

Engineering, Manufacturing Engineering, Materials Science +16

Line-profile and critical-dimension monitoring using a normal incidence optical CD metrology

Weidong Yang, Jiangtao Hu, R. Lowe-Webb et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 31 citations

Engineering, Electrical Engineering, Materials Science +17

Performance Evaluation of the uMI Panorama PET/CT System in Accordance with the National Electrical Manufacturers Association NU 2-2018 Standard

Guiyu Li, Wenhui Ma, Xiang Li et al. · Journal of Nuclear Medicine · 2024 · 27 citations · Full text

Engineering, Biomedical Engineering, Radiology +17

An Extreme Environment Capable Self‐Healing Single Active Layered Triboelectric Sensors as Fully Recyclable and Transparent Human‐Machine Interfaces

Mengmeng Liu, Pengju Li, Yu Jun Tan et al. · Advanced Functional Materials · 2024 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Line-profile and critical dimension measurements using a normal incidence optical metrology system

Weidong Yang, R. Lowe-Webb, Rahul Korlahalli et al. · 2002 · 11 citations

Engineering, Materials Engineering, Materials Science +17