Concepedia

Rahul Korlahalli

RK

Statistics

Publications

3

Citations

53

H-Index

3

Active since

2002

Affiliations

Nanosys (United States)(Current)

Applied Materials (United States)

Rahul Korlahalli is an author at Nanosys (United States) specializing in metrology, semiconductor metrology, and critical dimension metrology.

Publications per year

2002–2021

3

Publications

3

Line-profile and critical-dimension monitoring using a normal incidence optical CD metrology

Weidong Yang, Jiangtao Hu, R. Lowe-Webb et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 31 citations

, , +17

Line-profile and critical dimension measurements using a normal incidence optical metrology system

Weidong Yang, R. Lowe-Webb, Rahul Korlahalli et al. · 2002 · 11 citations

, , +17

X-ray critical dimension metrology solution for high aspect ratio semiconductor structures

Matthew Wormington, Adam Ginsburg, Israel Reichental et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 2021 · 11 citations

, , +16

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