Concepedia
Statistics
Publications
9
Citations
222
H-Index
Active since
2007
Affiliations
ASML (United States)(Current)
Advanced Micro Devices (United States)
ASML (Netherlands)
University at Albany, State University of New York
Micron (United States)
Bill Pierson is an author at ASML (United States) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectronic PackagingElectrical EngineeringIntegrated CircuitsOptoelectronicsMaterial ScienceMicroscopy
Publications per year
2007–2013
The use of EUV lithography to produce demonstration devices
Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations
EUVL system: moving towards production
H. Meiling, Nico Buzing, K. D. Cummings et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 32 citations · Full text
Short Wavelength Optic, Engineering, Electron-beam Lithography +26
Chemically amplified resists resolving 25 nm 1:1 line: space features with EUV lithography
James W. Thackeray, Roger A. Nassar, Robert L. Brainard et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 30 citations
Engineering, Electron-beam Lithography, Space Features +20
Pathway to sub-30nm Resolution in EUV Lithography
James W. Thakerlay, Roger A. Nassar, Kathleen Spear-Alfonso et al. · Journal of Photopolymer Science and Technology · 2007 · 29 citations · Full text
Engineering, Electron-beam Lithography, Microscopy +16
EUV lithography at the 22nm technology node
Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 22 citations
Technology Node, Electrical Engineering, Wafer Scale Processing +15
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