Kathleen Spear-Alfonso

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Active since

2006

Affiliations

Advanced Micro Devices (Canada)(Current)

ROHM

Kathleen Spear-Alfonso is an author at Advanced Micro Devices (Canada) specializing in electronic materials, process window development, and materials engineering.

Publications per year

2006–2007

Publications

Pathway to sub-30nm Resolution in EUV Lithography

James W. Thakerlay, Roger A. Nassar, Kathleen Spear-Alfonso et al. · Journal of Photopolymer Science and Technology · 2007 · 29 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Evaluation of High and Low Activation Resists for EUV Lithography

James W. Thackeray, Roger A. Nassar, Kathleen Spear-Alfonso et al. · Journal of Photopolymer Science and Technology · 2006 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +11

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