H. Meiling

Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour deposition

R.E.I. Schropp, K. F. Feenstra, Edith C. Molenbroek et al. · Philosophical Magazine B · 1997 · 131 citations

Engineering, Materials Engineering, Materials Science +17

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 90 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Progress on EUV pellicle development

Carmen Zoldesi, K. Bal, Brian Blum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 85 citations

Natural Sciences, Manufacturing Engineering, Materials Science +10

First performance results of the ASML alpha demo tool

H. Meiling, H.C. Meijer, Vadim Banine et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 78 citations

Engineering, Electrical Engineering, Microfabrication +5

ASML's NXE platform performance and volume introduction

Rudy Peeters, Sjoerd Lok, Erwin van Alphen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 71 citations

Engineering, Computer Engineering, Manufacturing Engineering +7