Concepedia
1
Publications
70
Citations
H-Index
2013
Active since
Affiliations
Carl Zeiss (Germany)(Current)
Erwin van Alphen is an author at Carl Zeiss (Germany).
Publications per year
2013–2013
ASML's NXE platform performance and volume introduction
Rudy Peeters, Sjoerd Lok, Erwin van Alphen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 70 citations
Rows per page
1–1 of 1