Concepedia

Rudy Peeters

RP

21

Publications

2.2K

Citations

19

H-Index

1970

Active since

Affiliations

ASML (Netherlands)(Current)

Carl Zeiss (Germany)

Radboud University Nijmegen

Institute for Atomic and Molecular Physics

Rudy Peeters is an author at ASML (Netherlands) specializing in engineering, applied physics, and instrumentation.

Top concepts

EngineeringApplied PhysicsInstrumentationNatural SciencesSpectroscopyPhysicsChemistry3D PrintingMicroelectronicsMicrofabrication

Publications per year

1970–2021

21

Publications

21

Cavity ring-down spectroscopy: Experimental schemes and applications

Giel Berden, Rudy Peeters, Gerard Meijer · International Reviews in Physical Chemistry · 2000 · 1K citations

Photonics, Crd Spectroscopy, Engineering +14

Cavity enhanced absorption and cavity enhanced magnetic rotation spectroscopy

R. Engeln, Giel Berden, Rudy Peeters et al. · Review of Scientific Instruments · 1998 · 349 citations

Magnetism, Photonics, Optical Rotation Spectroscopy +13

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 86 citations

Open-path trace gas detection of ammonia based on cavity-enhanced absorption spectroscopy

Rudy Peeters, Giel Berden, Arnoud Apituley et al. · Applied Physics B · 2000 · 84 citations

Chemical Engineering, Cavity-enhanced Absorption Spectroscopy, Engineering +9

Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner

Mark van de Kerkhof, Hans Jasper, Leon Levasier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 81 citations

Sub-10nm Node Lithography, Engineering, Electron-beam Lithography +16

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