Rudy Peeters

Cavity ring-down spectroscopy: Experimental schemes and applications

Giel Berden, Rudy Peeters, Gerard Meijer · International Reviews in Physical Chemistry · 2000 · 1K citations

Natural Sciences, Chemistry, Physics +17

Cavity enhanced absorption and cavity enhanced magnetic rotation spectroscopy

R. Engeln, Giel Berden, Rudy Peeters et al. · Review of Scientific Instruments · 1998 · 350 citations

Natural Sciences, Chemistry, Optics +16

EUV lithography performance for manufacturing: status and outlook

Alberto Pirati, Rudy Peeters, Daniel Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 90 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Open-path trace gas detection of ammonia based on cavity-enhanced absorption spectroscopy

Rudy Peeters, Giel Berden, Arnoud Apituley et al. · Applied Physics B · 2000 · 84 citations

Natural Sciences, Chemistry, Materials Science +14

Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner

Mark van de Kerkhof, Hans Jasper, Leon Levasier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 83 citations

Engineering, Manufacturing Engineering, Digital Fabrication +12