Mark van de Kerkhof

Physics and applications of dusty plasmas: The Perspectives 2023

J. Beckers, Johannes Berndt, Dietmar Block et al. · Physics of Plasmas · 2023 · 90 citations · Full text

Engineering, Plasma Science, Plasma Physics +16

Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner

Mark van de Kerkhof, Hans Jasper, Leon Levasier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 81 citations

Sub-10nm Node Lithography, Engineering, Electron-beam Lithography +16

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 58 citations

Optical Design, Engineering, Ilias System +26

Lithography for now and the future

Mark van de Kerkhof, Jos Benschop, Vadim Banine · Solid-State Electronics · 2019 · 51 citations

Materials Science, Engineering, Electron-beam Lithography +6

EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update

Mark van de Kerkhof, Arthur Minnaert, Marco Pieters et al. · 2018 · 44 citations

Fifth-generation Nxe:3400b Scanner, Electrical Engineering, Wafer Scale Processing +15