Wim de Boeij

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 59 citations

Natural Sciences, Biomedical Engineering, Digital Imaging +15

From performance validation to volume introduction of ASML's NXE platform

H. Meiling, Wim de Boeij, Frank Bornebroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 27 citations

Engineering, Manufacturing Engineering, Microelectromechanical Systems +8

New paradigm in lens metrology for lithographic scanner: evaluation and exploration

Kafai Lai, Gregg M. Gallatin, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 24 citations

Natural Sciences, Physics, Metrology +13

Optimizing and enhancing optical systems to meet the low k 1 challenge

Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations

Engineering, Physics, Biomedical Optics +15

Modeling polarization for hyper-NA lithography tools and masks

Kafai Lai, Alan E. Rosenbluth, Geng Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

Engineering, Electrical Engineering, Optics +16