Wim de Boeij

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 58 citations

Optical Design, Engineering, Ilias System +26

From performance validation to volume introduction of ASML's NXE platform

H. Meiling, Wim de Boeij, Frank Bornebroek et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 27 citations

New paradigm in lens metrology for lithographic scanner: evaluation and exploration

Kafai Lai, Gregg M. Gallatin, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 24 citations

Engineering, Microscopy, Optic Design +23

Optimizing and enhancing optical systems to meet the low k 1 challenge

Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations

Optical Materials, Engineering, Microscopy +30

Modeling polarization for hyper-NA lithography tools and masks

Kafai Lai, Alan E. Rosenbluth, Geng Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

Engineering, Electron-beam Lithography, Microscopy +21