Gregg M. Gallatin

Publications

1.8K

Citations

H-Index

1987

Active since

Affiliations

National Institute of Standards and Technology(Current)

Center for Nanoscale Science and Technology

Lawrence Berkeley National Laboratory

PerkinElmer (United States)

IBM Research - Thomas J. Watson Research Center

Gregg M. Gallatin is an author at National Institute of Standards and Technology specializing in engineering, applied physics, and optical properties.

Top concepts

EngineeringApplied PhysicsOptical PropertiesPhotonicsOptoelectronicsMaterial ScienceMicroelectronicsPhysicsMicroscopyMicrofabrication

Publications per year

1987–2018

Publications

Resist blur and line edge roughness

Gregg M. Gallatin · Optical Microlithography XVIII · 2005 · 251 citations

Device Modeling, Electrical Engineering, Engineering +10

Nanomanufacturing: A Perspective

J. Alexander Liddle, Gregg M. Gallatin · ACS Nano · 2016 · 210 citations · Full text

Engineering, Bottom-up Synthesis, Nanotechnology Revolution +21

Ranging and velocimetry signal generation in a backscatter-modulated laser diode

Peter J. de Groot, Gregg M. Gallatin, S.H. Macomber · Applied Optics · 1988 · 201 citations

Radar, Photonics, Asymmetric Waveform +12

Lithography, metrology and nanomanufacturing

J. Alexander Liddle, Gregg M. Gallatin · Nanoscale · 2011 · 89 citations

Semiconductor Chip Manufacturing, Engineering, Required Metrology +19

Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

Darı́o L. Goldfarb, Arpan P. Mahorowala, Gregg M. Gallatin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 86 citations

Engineering, Electron-beam Lithography, Microscopy +18

Rows per page

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