Haico Kok

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 59 citations

Natural Sciences, Biomedical Engineering, Digital Imaging +15

Extending immersion lithography down to 1x nm production nodes

Wim P. de Boeij, Remi Pieternella, Igor Bouchoms et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

Engineering, Manufacturing Engineering, Systems Engineering +13

New paradigm in lens metrology for lithographic scanner: evaluation and exploration

Kafai Lai, Gregg M. Gallatin, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 24 citations

Natural Sciences, Physics, Metrology +13

Imaging enhancements by polarized illumination: theory and experimental verification

Carsten Kohler, Wim de Boeij, Koen van Ingen-Schenau et al. · Optical Microlithography XVIII · 2005 · 10 citations

Engineering, Biomedical Engineering, Biomedical Imaging +13

Holistic feedforward control for the 5 nm logic node and beyond

Henry Megens, Ralph Brinkhof, Igor Aarts et al. · 2019 · 10 citations

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +14