Concepedia

Koen van Ingen-Schenau

KV

Statistics

Publications

2

Citations

53

H-Index

2

Active since

2005

Affiliations

ASML (Netherlands)(Current)

Carl Zeiss (Germany)

Koen van Ingen-Schenau is an author at ASML (Netherlands) specializing in engineering, volume production, and optoelectronics.

Publications per year

2005–2010

2

Publications

2

EUV into production with ASML's NXE platform

Christian Wagner, Noreen Harned, Peter Kuerz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 43 citations

, , +7

Imaging enhancements by polarized illumination: theory and experimental verification

Carsten Kohler, Wim de Boeij, Koen van Ingen-Schenau et al. · Optical Microlithography XVIII · 2005 · 10 citations

, , +13

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