Concepedia

Remi Pieternella

RP

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Publications

1

Citations

38

H-Index

1

Active since

2013

Affiliations

ASML (Netherlands)(Current)

Remi Pieternella is an author at ASML (Netherlands) specializing in aberration measurement, calibration, and fabrication tolerances.

Publications per year

2013–2013

1

Publications

1

Extending immersion lithography down to 1x nm production nodes

Wim P. de Boeij, Remi Pieternella, Igor Bouchoms et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

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