Concepedia

Marco Pieters

MP

3

Publications

70

Citations

3

H-Index

2003

Active since

Affiliations

ASML (Netherlands)(Current)

Marco Pieters is an author at ASML (Netherlands) specializing in microelectronics, 3d printing, and microfabrication.

Top concepts

3D PrintingEngineeringInstrumentationMicroelectronicsMicrofabricationMedicineMicroscopyOphthalmologyApplied PhysicsLaser Fabrication

Publications per year

2003–2019

3

Publications

3

EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update

Mark van de Kerkhof, Arthur Minnaert, Marco Pieters et al. · 2018 · 44 citations

Fifth-generation Nxe:3400b Scanner, Electrical Engineering, Wafer Scale Processing +15

High-NA EUV lithography exposure tool progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2019 · 16 citations

Study of the influence of substrate topography on the focusing performance of advanced lithography scanners

Bruno M. La Fontaine, Jan Hauschild, Mircea Dusa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +18

Rows per page

1–3 of 3