Concepedia

Jan Hauschild

JH

Statistics

Publications

2

Citations

20

H-Index

2

Active since

2003

Affiliations

ASML (Netherlands)(Current)

Jan Hauschild is an author at ASML (Netherlands) specializing in surface metrology, manufacturing engineering, and semiconductor metrology.

Publications per year

2003–2004

2

Publications

2

Study of the influence of substrate topography on the focusing performance of advanced lithography scanners

Bruno M. La Fontaine, Jan Hauschild, Mircea Dusa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

Engineering, Manufacturing Engineering, Metrology +13

Approaching new metrics for wafer flatness: an investigation of the lithographic consequences of wafer non-flatness

J. F. Valley, Noel Poduje, Jaydeep K. Sinha et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

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