Jan van Schoot

Extreme ultraviolet lithography

Dimitrios Kazazis, Jara G. Santaclara, Jan van Schoot et al. · Nature Reviews Methods Primers · 2024 · 74 citations

Materials Science, Ultraviolet Light, Extreme Ultraviolet Lithography +8

EUV lithography optics for sub-9nm resolution

Bernhard Kneer, Sascha Migura, Winfried Kaiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 66 citations

EUV lithography scanner for sub-8nm resolution

Jan van Schoot, Koen van Ingen Schenau, Chris Valentin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 61 citations

Engineering, Electron-beam Lithography, Microscopy +21

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 61 citations

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 58 citations

Engineering, Electron-beam Lithography, Microscopy +24