Winfried Kaiser

Pushing deep ultraviolet lithography to its limits

Michael Totzeck, Wilhelm Ulrich, Aksel Göhnermeier et al. · Nature Photonics · 2007 · 131 citations

Engineering, Electrical Engineering, Materials Science +10

EUV lithography optics for sub-9nm resolution

Bernhard Kneer, Sascha Migura, Winfried Kaiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 66 citations

Natural Sciences, Physics, Biomedical Imaging +12

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 62 citations

Engineering, Electrical Engineering, Optics +12

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 59 citations

Natural Sciences, Computer Systems, Digital Imaging +12

High-numerical aperture extreme ultraviolet scanner for 8-nm lithography and beyond

Jan van Schoot, Eelco van Setten, Gijsbert Rispens et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 54 citations

Engineering, Materials Engineering, Physics +12